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Applied Materials’ new inline e-beam review (EBR) system enables manufacturers of OLED and UHD LCD screens to accelerate production ramps and achieve optimum yields faster than traditional methods. Our technology is based on more than 20 years of leading-edge SEM (scanning electron microscope) capabilities used in semiconductor device review. Prior to the introduction of our EBR system, conducting SEM analysis on displays required breaking the glass substrate into pieces and examining each piece separately under a microscope. Applied has solved these costly and time-consuming limitations by providing inline SEM review at the industry’s highest resolution and throughput without requiring the panel to be broken.
In my article published in the latest issue of Applied’s Nanochip Fab Solutions magazine, I expand on the advantages of EBR for display makers.